Process gas introducing mechanism and plasma processing device

ABSTRACT

A processing gas introducing mechanism for introducing a processing gas into a processing space is provided between a plasma generation unit and a chamber of a plasma processing apparatus. The processing gas introducing mechanism includes a gas introducing base having therein a gas introducing path for introducing the processing gas into the processing space, and a near ring-shaped gas introducing plate equipped in the hole part of the gas introducing base such that it can be detached therefrom. Herein, the gas introducing base has a hole part forming one portion of the processing space in a central portion thereof, and the gas introducing plate has plural gas discharge holes communicating with the processing space to discharge thereinto the processing gas from the gas introducing path.

This application is a Continuation Application of PCT InternationalApplication No. PCT/JP04/006165 filed on Apr. 28, 2004, which designatedthe United States. FIELD OF THE INVENTION

The present invention relates to a processing gas introducing mechanismfor introducing a processing gas for use in a substrate processing, anda plasma processing apparatus for performing a plasma processing on asubstrate by introducing a processing gas.

BACKGROUND OF THE INVENTION

In a semiconductor manufacturing processing, e.g., a Ti film is formedon a bottom portion of a contact hole formed in a silicon wafer as anobject to be processed; a TiSi is formed by an interdiffusion between Tiand Si of a substrate; a barrier layer such as a TiN or the like isformed on the TiSi; an Al layer, a W layer, a Cu layer and the like areformed on the barrier layer; and thus, holes are filled and wirings arefabricated. Conventionally, for performing a series of processings asdescribed above, there has been employed a metal film forming system of,e.g., a cluster tool type having plural chambers. In such a metal filmforming system, there is performed, prior to a film forming processing,a processing for removing a native oxide film, an etching damage layerand the like, which are formed on the silicon wafer, in order to obtaina fine contact. As for a device removing such a native oxide film, ithas been known that an inductively coupled plasma is formed by using ahydrogen gas and an argon gas (Japanese Patent Laid-open Application No.H04-336426).

Further, as for a device performing a processing by forming aninductively coupled plasma, such a configuration has been known that abell jar made of a dielectric material is provided at an upper portionof a chamber in which a semiconductor wafer as an object to be processedis disposed; and a coil inductor connected to an RF power supply iswound in an outer periphery of the bell jar to generate an inductivelycoupled plasma (Japanese Patent Laid-open Application No. H10-258227,H10-116826, H11-67746 and 2002-237486).

This kind of inductively coupled plasma processing apparatus, a portionof which is shown in FIG. 1, can be configured such that a plasmageneration unit 400 including a bell jar 401, a coil 403, an RF powersupply (not shown) and the like, is fixed to a chamber 201 accommodatingtherein an object to be processed by using a screw through a gasintroducing ring 408 for introducing a processing gas.

To be specific, the bell jar 401 is fixed at the gas introducing ring408 by using a screw component 410 by a bell jar clamping element 409.At this time, between the bell jar clamping element 409, the gasintroducing ring 408 and the bell jar 401, there is inserted an annularbuffer 409 a made of a resin such as PTFE (polytetrafluoroethylene) orthe like, to protect the bell jar 401.

The gas introducing ring 408 supporting the bell jar 401 is configuredto be supported by a lid base 407, wherein the lid base 407 is mountedon the chamber 201.

Seal members 413 and 414 such as, e.g., O-ring or the like, are insertedinto spaces formed between the bell jar 401 and the gas introducing ring408, and between the lid base 407 and the chamber 201, to keep anairtightness therebetween.

For example, a processing gas such as an Ar gas, an H₂ gas or the likeis configured to be introduced into a processing space 402 from a gaschannel 408 b and a gas hole 408 a communicating with the gas channel408 b. The processing gas introduced as mentioned above isplasma-excited to perform a plasma processing on a semiconductor waferas a substrate to be processed.

In this case, scattered materials due to the plasma processing, e.g., asputter etching, are adhered to a side of the gas introducing ring 408or the lid base 407 to thereby become deposits. If the deposits aregetting thicker, they are peeled off from a place where they have beenadhered, to thereby become foreign materials. As a result, such problemsas lowering in an operation rate of the device, lowering in a productionyield of a semiconductor device and the like, are incurred.

For this reason, a cover shield 411 is configured to be attached byusing a screw 412, to cover the gas introducing ring 408 and the lidbase 407 inside the processing space 402. In case where the scatteredmaterials due to the etching are adhered to the cover shield 411, thecover shield 411 is replaced by unscrewing and then tightly screwingback the screw 412, to thereby prevent foreign materials from beingproduced due to accumulation of deposits.

Further, a hole portion 411 a having a diameter larger than that of agas hole 408 a is provided in the cover shield 411 in order not to blocka diffusion of the processing gas introduced from the gas hole 408 a.Accordingly, the deposits are likely to be adhered to the vicinity ofthe gas hole 408 a of the gas introducing ring 408. Thus, the gasintroducing ring 408 as well as the cover shield 411 needs to bereplaced when performing a maintenance.

However, when replacing the cover shield 411, the bell jar 401, the gasintroducing ring 408 and the lid base 407 need to be detached, therebyincreasing the time for maintenance, which becomes problematic. Further,the gas introducing ring 408 has a complicated configuration wherein thegas channel 408 b and the like are formed, and cost of a component to bereplaced is expensive, thereby increasing the running-cost of the deviceand lowering a productivity of the semiconductor device.

Meanwhile, in such an inductively coupled plasma processing apparatus, ashape of the processing space applied for the plasma processing has notbeen studied in detail and the uniformity in the plasma processing isnot necessarily satisfactory.

Further, as for a configuration of a susceptor mounting thereon a waferinside a vessel, in which a plasma is generated, it has been widelyknown that an area for supporting the wafer is cut to have a recessportion to perform a positioning of the wafer (Japanese Patent Laid-openApplication No. 2002-151412).

However, even in case of adopting such a configuration of the susceptor,the uniformity in the plasma processing is not satisfactory.

SUMMARY OF THE INVENTION

It is, therefore, a primary object of the present invention to provide aprocessing gas introducing mechanism and a plasma processing apparatuscapable of reducing running-cost by cutting cost of components to bereplaced when performing a maintenance.

It is another object of the present invention to provide a plasmaprocessing apparatus capable of easily performing a maintenance andreducing the time therefor.

It is still another object of the present invention to provide a plasmaprocessing apparatus capable of improving the in-surface uniformity ofan object to be processed in a plasma processing by using an inductivelycoupled plasma.

It is still another object of the present invention to provide a plasmaprocessing apparatus capable of improving the in-surface uniformity ofan object to be processed, without increasing cost for design orfabrication, and without losing the universality of a configuration of adevice.

In accordance with the first aspect of the present invention, there isprovided a processing gas introducing mechanism, provided between aplasma generation unit and a chamber accommodating therein a substrateto be processed of a plasma processing apparatus, for introducing aprocessing gas into a processing space formed by the plasma generationunit and the chamber, including: a gas introducing base disposed on thechamber to support the plasma generation unit, the gas introducing basehaving therein a gas introducing path for introducing the processing gasinto the processing space, and, in a central portion thereof, a holepart forming one portion of the processing space; and a near ring-shapedgas introducing plate equipped in the hole part of the gas introducingbase such that it can be detached therefrom, the gas introducing platehaving plural gas discharge holes communicating with the processingspace to discharge thereinto the processing gas from the gas introducingpath.

In accordance with the second aspect of the present invention, there isprovided a plasma processing apparatus, including: a plasma generationunit for producing a plasma; a chamber accommodating therein a substrateto be processed; and a processing gas introducing mechanism, providedbetween the plasma generation unit and the chamber, for introducing aprocessing gas for producing a plasma into a processing space formed bythe plasma generation unit and the chamber, wherein the processing gasintroducing mechanism contains: a gas introducing base disposed on thechamber to support the plasma generation unit, the gas introducing basehaving therein a gas introducing path for introducing the processing gasinto the processing space, and, in a central portion thereof, a holepart forming one portion of the processing space; and a near ring-shapedgas introducing plate equipped in the hole part of the gas introducingbase such that it can be detached therefrom, the gas introducing platehaving plural gas discharge holes communicating with the processingspace to discharge thereinto the processing gas from the gas introducingpath.

In accordance with the third aspect of the present invention, there isprovided a plasma processing apparatus, including: a plasma generationunit for producing a plasma; a chamber accommodating therein a substrateto be processed; a processing gas introducing mechanism, providedbetween the plasma generation unit and the chamber and disposed in thechamber to support the plasma generation unit, for introducing aprocessing gas for producing a plasma into a processing space formed bythe plasma generation unit and the chamber; and an attaching anddetaching mechanism for attaching the processing gas introducingmechanism and the plasma generation unit to the chamber and detachingthem therefrom.

In accordance with the first and the second aspect of the presentinvention, the gas introducing base is configured to be disposed on thechamber to support the plasma generation unit, to have therein the gasintroducing path for introducing the processing gas into the processingspace, and, in a central portion thereof, and to have the hole partforming one portion of the processing space; and the near ring-shapedgas introducing plate having plural gas discharge holes communicatingwith the processing space to discharge thereinto the processing gas fromthe gas introducing path is equipped in the hole part of the gasintroducing base such that it can be detached therefrom. Thus, theconfiguration of the processing gas introducing mechanism becomessimplified, and consumables thereof may be replaced easily. Accordingly,the time for maintenance may be shortened, and an operating rate of theplasma processing apparatus is increased to thereby improve theproductivity thereof. Further, since the configuration of the processinggas introducing mechanism becomes simplified, the production costthereof may be reduced, and thus, cost reduction in the configuration ofthe plasma processing apparatus may be achieved.

In accordance with the third aspect of the present invention, theattaching and detaching mechanism for attaching the processing gasintroducing mechanism and the plasma generation unit to the chamber anddetaching them therefrom is installed, so that the maintenance may bereadily performed and the time therefor may be shortened.

In accordance with the fourth aspect of the present invention, there isprovided a plasma processing apparatus for performing a plasmaprocessing on a substrate to be processed, the apparatus including: achamber accommodating therein the substrate to be processed; a plasmageneration unit, having a bell jar and an antenna, for producing aplasma inside the bell jar, wherein the bell jar made of a dielectricmaterial is provided at an upper part of the chamber to communicatetherewith and the antenna is coiled around an outer side of the bell jarto generate an induced electric field in the bell jar; a processing gasintroducing mechanism, provided between the plasma generation unit andthe chamber, for introducing a processing gas for producing a plasmainto a processing space formed by the plasma generation unit and thechamber; and a mounting table for mounting thereon the substrate to beprocessed: provided in the chamber, wherein, given that an innerdiameter of the bell jar is D and an inside measurement of height in acentral portion of the bell jar is H, a flatness K defined by a ratioD/H is in the range of 1.60˜9.25.

In accordance with the fifth aspect of the present invention, there isprovided a plasma processing apparatus for performing a plasmaprocessing on a substrate to be processed, the apparatus including: achamber accommodating therein the substrate to be processed; a plasmageneration unit, having a bell jar and an antenna, for producing aplasma inside the bell jar, wherein the bell jar made of a dielectricmaterial is provided at an upper part of the chamber to communicatetherewith and the antenna is coiled around an outer side of the bell jarto generate an induced electric field in the bell jar; a processing gasintroducing mechanism, provided between the plasma generation unit andthe chamber, for introducing a processing gas for producing a plasmainto a processing space formed by the plasma generation unit and thechamber; and a mounting table for mounting thereon the substrate to beprocessed provided in the chamber, wherein, given that an inner diameterof the bell jar is D and a distance from a ceiling portion of a centralportion of the bell jar to the mounting table is H1, a flatness K1defined by a ratio D/H1 is in the range of 0.90˜3.85.

The fourth and the fifth aspect of the present invention are based onthe knowledge found by the present inventors that the height of the belljar has a significant impact on a variation in the density distributionof the plasma for the substrate to be processed in the processingapparatus using the inductively coupled plasma as mentioned above, andit is effective to optimize the height of the bell jar to improve thein-surface uniformity in the plasma processing as described above on thesilicon wafer of the large diameter, particularly.

In accordance with the fourth aspect of the present invention, since theflatness K of the bell jar in which a plasma is produced is set large inthe range of 1.60˜9.25, the plasma produced in the bell jar above thesubstrate to be processed disposed on the mounting table gets widertowards a process surface of the substrate to be processed, and thus,the density distribution of the plasma becomes uniform along the processsurface. Accordingly, the in-surface uniformity of the substrate to beprocessed in the plasma processing is improved.

In accordance with the fifth aspect of the present invention, since theflatness K1 of the bell jar, taking the distance from the mounting tableto the ceiling portion of the bell jar into consideration, is set largein the range of 0.90˜3.85, the plasma produced in the bell jar above thesubstrate to be processed disposed on the mounting table gets widertowards a process surface of the substrate to be processed, and thus,the density distribution of the plasma becomes uniform along the processsurface. Accordingly, the in-surface uniformity of the substrate to beprocessed in the plasma processing is improved.

Further, in the fourth and the fifth aspect, the bell jar is madeflatter while employing the configurations of the conventional art forother chamber parts, so that it is possible to improve the in-surfaceuniformity of the substrate to be processed during the plasma processingwithout bring about running-cost increase due to modification of designfor the chamber part or the like, or lowering of the universality, whichis caused by modification of external connecting configuration of thechamber part or the like.

In accordance with the sixth aspect of the present invention, there isprovided a plasma processing apparatus for performing a plasmaprocessing on a substrate to be processed, the apparatus including: achamber accommodating therein the substrate to be processed; a plasmageneration unit, having a bell jar and an antenna, for producing aplasma inside the bell jar, wherein the bell jar made of a dielectricmaterial is provided at an upper part of the chamber to communicatetherewith and the antenna is coiled around an outer side of the bell jarto generate an induced electric field in the bell jar; a processing gasintroducing mechanism, provided between the plasma generation unit andthe chamber, for introducing a processing gas for producing a plasmainto a processing space formed by the plasma generation unit and thechamber; a mounting table for mounting thereon the substrate to beprocessed provided in the chamber; and a mask, made of a dielectricmaterial, for covering the mounting table and mounting thereon thesubstrate to be processed, and wherein the mask has a first region wherethe substrate to be processed is mounted and a second region around thefirst region, and the first and the second region are configured to havea same height.

The sixth aspect of the present invention is to resolve such a problemthat, in the conventional susceptor, an area for supporting the wafer iscut to have a recess portion and an impedance in the outer periphery ofthe recess portion gets larger than that of the central portion thereof,so that a bias for producing a plasma and the like may be affected, andthus, lowering the in-surface uniformity in the plasma processing.Further, in the mask of the mounting table where the substrate to beprocessed is mounted, since the first region where the substrate to beprocessed is mounted and the second region around the first region areconfigured to have a same height, impedances in the first and the secondregion are uniform during the plasma generation, and densitydistributions of the plasma in the peripheral and the central portionsof the substrate to be processed are uniform, to thereby improve thein-surface uniformity of the substrate to be processed during the plasmaprocessing.

BRIEF DESCRIPTION OF THE DRAWINGS

The above and other objects and features of the present invention willbecome apparent from the following description of preferred embodimentsgiven in conjunction with the accompanying drawings, in which:

FIG. 1 offers a view schematically showing a magnified portion of aconventional plasma processing apparatus;

FIG. 2 shows a cross sectional view schematically showing a plasmaprocessing apparatus in accordance with a first embodiment of thepresent invention;

FIG. 3 explains a cross sectional view showing a magnified gasintroducing mechanism of the plasma processing apparatus in accordancewith the first embodiment of the present invention;

FIG. 4A sets forth a perspective view showing a gas introducing baseforming the gas introducing mechanism;

FIG. 4B presents a cross sectional view showing the gas introducingbase;

FIG. 5A provides a perspective view showing a gas introducing plateforming the gas introducing mechanism;

FIG. 5B describes a cross sectional view showing the gas introducingplate;

FIG. 6 depicts a cross sectional view showing a magnified portion of thegas introducing mechanism;

FIG. 7 describes a cross sectional view showing a modified example ofthe gas introducing mechanism;

FIG. 8 offers a perspective view showing an external appearance of theplasma processing apparatus in accordance with the first embodiment ofthe present invention;

FIG. 9 shows a cross sectional view showing a plasma processingapparatus in accordance with a second embodiment of the presentinvention;

FIG. 10A is a view showing a simulation result of a density distributionof Ar⁺ in Ar plasma of the conventional plasma processing apparatus;

FIG. 10B provides a view showing a simulation result of a densitydistribution of Ar⁺ in plasma for the plasma processing apparatus inaccordance with the second embodiment of the present invention;

FIG. 11 presents a graph showing an exemplary effect of a shape of abell jar for the plasma processing apparatus in accordance with thesecond embodiment of the present invention;

FIG. 12 sets forth a cross sectional view showing a modified example ofthe plasma processing apparatus in accordance with the second embodimentof the present invention;

FIG. 13 describes a schematic cross sectional view showing a mountingconfiguration of the semiconductor wafer for a plasma processingapparatus in accordance with a third embodiment of the presentinvention;

FIG. 14 offers a cross sectional view showing a magnified mountingconfiguration of the semiconductor wafer of FIG. 13;

FIG. 15 is a plane view showing the mounting configuration of thesemiconductor wafer of FIG. 13; and

FIG. 16 presents a graph showing a relationship between a variation inan etching result and a step height of a mounting portion of thesemiconductor wafer in accordance with the third embodiment of thepresent invention.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENT

Preferred embodiments of the present invention will be described withreference to the accompanying drawings.

First Embodiment

FIG. 2 is a schematic configuration of a plasma processing apparatus inaccordance with a first embodiment of the present invention. A plasmaprocessing apparatus 100 for performing a plasma processing on asubstrate to be processed is employed, e.g., in a processing forplasma-etching to remove an impurity layer containing an oxide film suchas a native oxide or the like, which is formed on a metal film or asilicon formed on the substrate to be processed.

The plasma processing apparatus 100 includes a chamber 10 accommodatingtherein a semiconductor wafer as a substrate to be processed; a wafersupporting portion 20 supporting the semiconductor wafer in the chamber10; a plasma generation unit 40, installed to cover the chamber 10, forgenerating a plasma in a processing space S where a plasma processing isperformed on the wafer; a gas introducing mechanism 50 for introducing agas for producing a plasma into the processing space S; and a gas supplyunit 60 for supplying a gas for producing a plasma into the gasintroducing mechanism 50. Further, though not shown in FIG. 2, there isalso included an attaching and detaching mechanism, as explained below,for attaching and detaching the gas introducing mechanism 50 and theplasma generation unit 40.

The chamber 10 made of a metal material, such as aluminum, aluminumalloy or the like, has a cylindrical main body 11; and an exhaustchamber 12 provided at a lower part of the main body 11 and having adiameter smaller than that of the main body 11. The exhaust chamber 12is installed to uniformly exhaust an inside of the main body 11.

At an upper part of the chamber 10, there is installed a bell jar 41 asa constituent of the plasma generation unit 40 in such a way that it isconnected to the chamber 10 to be able to communicate therewith. Thebell jar 41 made of a dielectric material is of a cylindrical shape,e.g., a domed shape, whose upper portion is closed. Further, aprocessing vessel is formed by the chamber 10 and the bell jar.41, andan inside thereof corresponds to the processing space S.

The wafer supporting portion 20 has a susceptor (mounting table) 21,made of a dielectric material, for horizontally supporting thesemiconductor wafer W as an object to be processed, wherein thesusceptor 21 is disposed to be supported by a cylindrical supportingmember 22 made of a dielectric material. Further, it can be configuredsuch that a recess portion having a substantially same shape as that ofthe wafer W is formed at a top surface of the susceptor 21 toaccommodate therein the wafer W, or an electrostatic adsorptionmechanism may be provided at the top surface of the susceptor 21 toallow the wafer W to be adsorbed. As for the dielectric material formingthe susceptor 21, ceramic materials, e.g., AlN and Al₂O₃, may beenumerated, and, among these, AlN of a high thermal conductivity ispreferably used.

At an outer periphery of the susceptor 21, there is installed avertically movable shadow ring 23 to cover an edge of the wafer Wmounted on the susceptor 21. The shadow ring 23 focuses a plasma tofacilitate to make it uniform. Further, it functions to protect thesusceptor 21 from the plasma.

A mesh-shaped electrode 24 made of a metal, such as Mo, W or the like,is horizontally buried into the susceptor 21 at the upper portionthereof. To the electrode 24, there is connected a high frequency powersupply 25 for attracting ions by applying a high frequency bias to thewafer, through a matching unit 26.

Further, a heater 28 is buried into the susceptor 21 to be disposedbelow the electrode 24 and can heat the wafer W to keep it at apredetermined temperature by feeding a power to the heater 28 from aheater source 29. Still further, feeder lines extending to the electrode24 and the heater 28 are inserted into the supporting member 22.

Three wafer elevating pins 31 (only two of them are shown) forsupporting and lifting up and down the wafer W are inserted into thesusceptor 21; and they are installed such that they can be popped outfrom or popped into the top surface of the susceptor 21. These waferelevating pins 31 are fixed at a supporting plate 32 and elevatedthrough the supporting plate 32 by using an elevation mechanism 33 suchas an air cylinder or the like.

Inside the main body 11 of the chamber 10, there is installed attachablyand detachably a near cylindrical chamber shield 34 for preventingby-products and the like, which are produced during the plasma etching,from being adhered to an inner wall of the main body 11 along therewith.The chamber shield 34 is made of a Ti material (Ti or Ti alloy). As fora shield material, an Al material may be used, but particles may begenerated during the processing in case of using it. Therefore, a Timaterial is preferably used, since it has a high adhesivity to depositsand is able to significantly reduce generation of particles. Further, ashield main body of the Al material coated with Ti may be used. Stillfurther, in a surface of the chamber shield 34, there may be formed fineprominences and depressions by using a blast processing or the like toimprove the adhesivity to the deposits. The chamber shield 34 is fixedat a bottom wall of the main body 11 of the chamber 10 by using bolts 35in some places (two places in the drawing); and it is detached from themain body 11 of the chamber 10 by pulling out the bolts 35. Accordingly,a maintenance of the chamber 10 may be readily performed.

At a sidewall of the chamber 10, there is formed an opening 36, which isopened or closed by using a gate valve 37. While the gate valve 37 isopened, the semiconductor wafer W is transferred between a neighboringload-lock chamber (not shown) and the chamber 10.

The exhaust chamber 12 of the chamber 10 is provided to be downwardlyprotruded to cover a circular hole formed in the center of the bottomwall of the main body 11. A gas exhaust line 38 is connected to a sideof the exhaust chamber 12, and a gas exhaust unit 39 is connectedthereto. Further, by operating the gas exhaust unit 39, insides of thechamber 10 and the bell jar 41 can be uniformly depressurized to apredetermined vacuum level.

The plasma generation unit 40 has the aforementioned bell jar 41; a coil43 as an antenna unit, which is wound in an outer side of the bell jar41; a high frequency power supply 44 supplying a high frequency power tothe coil 43; and a shield vessel 46 covering the bell jar 41 and thecoil 43 to shield ultraviolet and electromagnetic waves of plasma.

The bell jar 41 made of a dielectric material such as ceramic material,e.g., quartz, AlN or the like, has a cylindrical sidewall portion 41 aand a domed ceiling wall portion 41 b disposed thereon. The coil 43 iswound by the predetermined number of windings in a substantiallyhorizontal direction in the outer side of the side wall portion 41 aforming a cylinder of the bell jar 41, with 5 10 mm pitch between coils,and preferably, 8 mm pitch. The coil 43 is supported and fixed by usingan insulating material, e.g., a fluorine resin or the like. In thedrawing, the number of windings of the coil 43 is seven times.

The high frequency power supply 44 is connected to the coil 43 through amatching unit 45.

The high frequency power supply 44 generates a high frequency power of afrequency, e.g., 300 kHz 60 MHz, and preferably, 450 kHz˜13.56 MHz. Bysupplying a high frequency power to the coil 43 from the high frequencypower supply 44, an inductive electromagnetic field is generated in theprocessing space S inside the bell jar 41 through the side wall portion41 a thereof, which is made of a dielectric material.

The gas introducing mechanism 50 is provided between the chamber 10 andthe bell jar 41, for supporting the bell jar 41, and includes a gasintroducing base 48 mounted on the chamber 10; a gas introducing plate49 equipped inside the gas introducing base 48; and a bell jar clampingelement 47 for fixing the bell jar 41 to the gas introducing base 48.Further, it is configured such that a processing gas from the gas supplymechanism 60 is to be discharged to the processing space S through a gasintroducing path 48 e formed in the gas introducing base 48 and gasdischarge openings 49 a formed in the gas introducing plate 49 that willbe explained later.

The gas supply mechanism 60 has an Ar gas supply source 61 and an H₂ gassupply source 62, to which gas lines 63 and 64 are connected,respectively, wherein the gas lines 63 and 64 are connected to a gasline 65. Further, the gases are guided to the gas introducing mechanism50 through the gas line 65. In the gas lines 63 and 64, there areinstalled mass flow controllers 66, and opening/closing valves 67 havingtherebetween the mass flow controllers 66.

The Ar gas and the H₂ gas as a processing gas, which have been suppliedto the gas introducing mechanism 50 through the gas line 65 of the gassupply mechanism 60, as mentioned above, are discharged to theprocessing space S through the gas introducing path 48 e of the gasintroducing mechanism 50 and the gas discharge holes 49 a formed in thegas introducing plate 49; and they turn into a plasma by the inductiveelectromagnetic field generated in the processing space S as describedabove, to thereby form an inductively coupled plasma.

In the following, a configuration of the gas introducing mechanism 50will be explained in detail.

As in a magnified view shown in FIG. 3, at the gas introducing base 48,there is formed a first gas flow path 48 a coupled to a gas introducingpath 11 b formed at a wall portion of the main body 11 of the chamber10, wherein the first gas flow path 48 a is coupled to a second gas flowpath 48 b formed in a substantially annular or semicircular shape insidethe gas introducing base 48. Further, plural third gas flow paths 48 care formed equi-spacedly or diagonally toward the inner side from thesecond gas flow path 48 b. Meanwhile, a near annular fourth gas flowpath 48 d is formed between the gas introducing base 48 and the gasintroducing plate 49 such that the gas can be diffused uniformly, andthe third gas flow paths 48 c are connected thereto. Further, thesefirst through fourth gas flow paths 48 a, 48 b, 48 c and 48 d areconfigured to communicate with each other to form a gas introducing path48 e.

The processing gas introduced from the gas line 65 is diffused uniformlyin the second gas flow path 48 b formed in a substantially annular orsemicircular shape from the first gas flow path 48 a formed at the gasintroducing base 48, through the gas introducing path 11 b. Further, theprocessing gas reaches the fourth gas flow path 48 d of a substantiallyannular shape through the plural third gas flow paths 48 c, whichcommunicate with the second gas flow path 48 b to be extended towardsthe processing space S.

Meanwhile, as mentioned above, in the gas introducing plate 49, thereare equi-spacedly formed a number of gas discharge holes 49 acommunicating with the fourth gas flow path 48 d and the processingspace S; and the processing gas is discharged to the processing space Sthrough the gas discharge holes 49 a from the fourth gas flow path 48 d.Further, in the vicinity of a connection part of the gas introducingpath 11 b and the first gas flow path 48 a, there are installed sealrings 52 to keep an airtightness of a path, through which the processinggas is supplied.

Further, the gas introducing base 48 is configured to be mounted on themain body 11 of the chamber 10 while supporting the bell jar 41, asdescribed above. At this time, between the gas introducing base 48 andthe bell jar 41, and between the gas introducing base 48 and the, mainbody 11 of the chamber 10, there are intervened respective seal members53 and 54, e.g., O-ring or the like, to keep an airtightness of theprocessing space S.

The bell jar 41 is supported by the gas introducing base 48, and an endportion thereof is fixed thereto by using the bell jar clamping element47. Further, the bell jar clamping element 47 is clamped by using ascrew 55 on the gas introducing base 48. Between the bell jar clampingelement 47 and the gas introducing base 48 and the bell jar 41, there isintervened with a buffer 47 a made of PTFE or the like. It is intendedto prevent the bell jar 41 made of a dielectric material, e.g., quartz,A₂O₃, AlN or the like, from being damaged due to collision with the belljar clamping element 47 or the gas introducing base 48 made of a metalmaterial, e.g., Al or the like. Further, the gas introducing base 48 andthe gas introducing plate 49 are clamped with each other by using screws56.

In the following, the gas introducing base 48 and the gas introducingplate 49 forming the aforementioned processing gas introducing mechanism50 will be discussed in detail.

FIGS. 4A and 4B present the gas introducing base 48: wherein FIG. 4A isa perspective view thereof; and FIG. 4B is a cross sectional view takenalong A-A line of FIG. 4A. The gas introducing base 48 made of a metalmaterial, e.g., Al or the like, is configured to have a substantiallycircular hole 48 f in the center thereof, as shown in FIG. 4A, whereinthe hole 48 f forms one portion of the processing space S when the gasintroducing base 48 is attached to the plasma processing apparatus 100.In the gas introducing base 48, as shown in the cross section of FIG.4B, there are formed the above-described first through third gas flowpaths 48 a, 48 b and 48 c; and the third gas flow paths 48 c communicatewith a space 48 d′. In an inner peripheral surface of the gasintroducing base 48, there is formed a step portion, which matches thatof the gas introducing plate 49. Further, when the gas introducing plate49 is attached to the gas introducing base 48, a fourth gas flow path 48d is formed in a part corresponding to the space 48 d′.

FIGS. 5A and 5B present the gas introducing plate 49: wherein FIG. 5A isa perspective view thereof; and FIG. 5B is a cross sectional view takenalong B-B line of FIG. 5A.

The gas introducing plate 49 of a substantially circular shape is madeof a metal material, e.g., Ti, Al or the like, or a coated materialwherein an Al basic material is coated with Ti by using a spraying orthe like. The gas introducing plate 49 has a cylindrical main body 49 bhaving a step portion, and a flange part 49 c formed at an outerperipheral portion of a bottom portion thereof; and a number of gasdischarge holes 49 a are provided along a circumferential surface of themain body 49 b. Further, in the flange part 49 c, there are formedplural fixing holes, into which the aforementioned screws 56 areinserted to fix the flange part 49 c to the gas introducing base 48.

FIG. 6 describes a state in which the gas introducing base 48 is matchedwith the gas introducing plate 49 to be fixed thereto by using thescrews 56. As shown in this drawing, the gas introducing base 48 isfixed together with the gas introducing plate 49 by using the screws 56in the state in which the step portion of the gas introducing base 48 iscoincided with that of the gas introducing plate 49 to be matchedthereto. Further, at this time, the fourth gas flow path 48 d is formedtherebetween, so that the gas is discharged from the gas discharge holes49 a communicating with the fourth gas flow path 48 d. The gasintroducing plate 49 is configured to be easily attached to the gasintroducing base 48 or detached therefrom by using the screws 56.

As described in FIG. 7, a gas discharge hole 49 a′ may be of, e.g., acone or a trumpet shape whose width gets wider towards the processingspace S from the fourth gas flow path 48 d. In this way, the processinggas can be supplied efficiently and uniformly into the large processingspace S.

In the following, attaching and detaching mechanisms of theaforementioned gas introducing mechanism 50 and the plasma generationunit 40 will now be explained with reference to FIG. 8 showing anexternal appearance of the plasma processing apparatus 100.

As described in FIG. 8, the attaching and detaching mechanism 70 has apair of first hinge components 72 equipped by using the screws 72 c atone side of the gas introducing plate 48, which defines an outerperiphery of the gas introducing mechanism 50; and a second hingecomponent 73 provided between the pair of first hinge components 72 andfixed to the main body 11 of the chamber 10 by using the screws 73 c. Inthe central portions of the hinge components 72 and 73, there areprovided respective bearing 72 a and 73 a, through which a shaft 71 isinserted. In this way, the gas introducing mechanism 50 and the plasmageneration unit 40 are upwardly rotated to be detached from the chamber10 by using the shaft 71 as a center of rotation, from the state wherethe gas introducing mechanism 50 having a rectangular externalappearance is attached to the main body 11 of the chamber 10, whereinthe main body 11 is of an identical rectangular shape. Namely, the gasintroducing mechanism 50 and the plasma generation unit 40 areconfigured to be readily attached to the chamber 10 and detachedtherefrom by the attaching and detaching mechanism 70, so that amaintenance can be readily performed while the gas introducing mechanism50 and the plasma generation unit 40 are upwardly rotated.

Further, the attaching and detaching mechanism 70 has a damper 75. Oneend of the damper 75 is fixed to the gas introducing plate 48 by using afixing member 75 a, and the other end thereof is fixed to the main body11 of the chamber 10.

The damper 75 having therein, e.g., Hydraulic equipment, is configuredto be extensible and contractible, and to apply a lifting force along aheight direction, i.e., a rotation direction, when the gas introducingmechanism 50 and the plasma generation unit 40 are upwardly rotated. Forthe same reason, it is possible to reduce the force required forsupporting the gas introducing mechanism 50 and the plasma generationunit 40, when they are rotated upward. Further, a handle 74 is providedat the gas introducing base 48 by using screws 74 a to be gripped by theoperator, when the plasma generation unit 40 being attached or detached.

In the following, a processing operation by using the plasma processingapparatus 100 as configured above will be discussed.

First, the gate valve 37 is opened to load the wafer W into the chamber10 by using a transfer arm (not shown), and the wafer elevating pins 31protruded from the susceptor 21 receive thereon the wafer W.Subsequently, the wafer elevating pins 31 are lowered to allow the waferW to be mounted on the top surface of the susceptor 21; and the shadowrings 23 are lowered.

Thereafter, the gate valve 37 is closed to exhaust insides of thechamber 10 and the bell jar 41 by using the gas exhaust unit 39 to keepthem at a predetermined depressurized state. In such a depressurizedstate, the Ar gas and the H₂ gas supplied from the gas supply mechanism60 are discharged to the processing space S through the gas introducingmechanism 50. At the same time, high frequency powers are supplied tothe electrode 24 inside the susceptor 21 and the coil 43 from the highfrequency power supplies 25 and 44, respectively, so that an electricfield is generated in the processing space S and the gas introduced intothe bell jar 41 is excited to ignite the plasma.

After the ignition of the plasma, an induced current flows through thebell jar 41 to generate the plasma continuously, and a native oxide filmformed on the wafer W, e.g., a silicon oxide formed on a silicon or ametal oxide film formed on a metal film, is etched to be removed by theplasma. At this time, a bias is applied to the susceptor 21 from thehigh frequency power supply 25, and the wafer W is kept at apredetermined temperature by the heater 28.

The conditions may be set such that a pressure of the processing space Sis 0.1˜13.3 Pa, and preferably, 0.1˜2.7 Pa; a temperature of the waferis 100˜500° C.; a flow, rate of Ar gas is 0.001˜0.03 mL/min and that ofH₂ is 0˜0.06 L/min, and preferably, 0˜0.03 L/min; a frequency of thehigh frequency power supply 44 for producing a plasma is 300 kHz˜60 MHz,and preferably, 450 kHz˜13.56 MHz; and a power is 500˜3000 W, and apower of the high frequency power supply 25 is 0˜1000 W (−20˜−200 V as abias potential). At this time, a plasma density is 0.7˜10×10¹⁰atoms/cm³, and preferably, 1˜6×10¹⁰ atoms/cm³. Under such conditions,the processing is performed for about 30 seconds, so that, e.g., asilicon oxide film (SiO₂) is removed by about 10 nm.

As mentioned above, by removing an impurity layer containing oxides suchas a native oxide film and the like, it is possible to achieve sucheffects that adhesivity of a film to be formed is improved and anelectrical resistance value is reduced.

In this case, the gas introducing mechanism 50 for discharging theprocessing gas also functions to introduce the processing gas into theprocessing space S by being mounted on the main body 11 of the chamber10 while keeping an airtightness, as well as to support the bell jar 41,as described above. Therefore, the number of components in the plasmaprocessing apparatus is reduced to simplify the configuration, so thatcost reduction in the plasma processing apparatus may be achieved.

Further, in case when performing the sputter etching as the plasmaprocessing on the semiconductor wafer W as mentioned, if scatteredmaterials are deposited to members around the semiconductor wafer W dueto the sputtering, particulates such as fine particles may be generatedto thereby lower the production yield of the semiconductor device. Forexample, the scattered materials are likely to be deposited to themembers around the semiconductor wafer W, specifically, the part wheredeposits are accumulated, e.g., around the gas discharge holes 49 a.

Therefore, in the present embodiment, the gas introducing plate 49 isconfigured to be attached to the gas introducing base 48 by using thescrews 56 and detached therefrom. Accordingly, the gas introducing plate49 may be readily replaced, and the time for maintenance may beshortened. Further, since the gas introducing plate 49 has a simpleconfiguration and is formed of cheap components, the cost formaintenance may be kept low.

Further, as described above, the gas introducing mechanism 50 and theplasma generation unit 40 can be readily attached and detached by theattaching and detaching mechanism 70. Therefore, in case when the plasmaprocessings are repeatedly performed, and thus, maintenance needs to beperformed, the time for maintenance of the plasma processing apparatus100 may be shortened and an operation rate thereof can be improved.Further, productivity of the semiconductor device may be improved.

To be specific, in case where the maintenance is performed on thechamber 10 when replacing the bell jar 41 or an operation such aswet-cleaning or the like is performed, the plasma generation unit 40needs to be detached therefrom. At this time, the plasma generation unit40 and the gas introducing mechanism 50 may be simultaneously rotated tobe detached together, as mentioned above, and the maintenance operationtherefor may be performed in a short time.

Further, since the gas introducing mechanism 50 and the plasmageneration unit 40 can be readily attached and detached as mentionedabove, an operation for replacing the gas introducing plate 49 of thegas introducing mechanism may be performed readily in a short time bydetaching the gas introducing mechanism 50 and the plasma generationunit 40 from the chamber 10.

Still further, the attaching and detaching mechanism 70 has the damper75 exerting the lifting force to the plasma generation unit 40 in itsopening direction, so that it is possible to reduce the force requiredfor supporting the plasma generation unit 40 when it being rotated.Therefore, the maintenance operation gets easier, and efficiency thereofis improved.

Second Embodiment

In the following, a second embodiment of the present invention will bediscussed.

FIG. 9 is a schematic view of a configuration of a plasma processingapparatus in accordance with the second embodiment of the presentinvention. The plasma processing apparatus 100′, like as the plasmaprocessing apparatus 100 of the first embodiment, is applied to aprocess for plasma-etching to remove an impurity layer containing anoxide film, e.g., a native oxide film or the like, formed on a metalfilm or a silicon formed on a substrate to be processed. Further, theplasma processing apparatus 100′ has a chamber 10′ accommodating thereina semiconductor wafer as a substrate to be processed; a wafer supportingportion 20′ supporting the semiconductor wafer inside the chamber 10′; aplasma generation unit 40′, installed to cover the chamber 10′, forproducing a plasma in a processing space S where a plasma processing isperformed on a wafer; a gas introducing mechanism 50′ introducing intothe processing space S a gas for producing a plasma; and a gas supplymechanism 60′ supplying the gas for producing a plasma to the gasintroducing mechanism 50′.

Among these, since the chamber 10′, the wafer supporting portion 20′ andneighboring members thereof are configured to be completely identical tothose of the first embodiment, identical reference numerals will be usedfor the corresponding parts having substantially same functions andconfigurations of FIG. 2, and explanations thereof will be omitted.

The plasma generation unit 40′ has a bell jar 141; a coil 143 as anantenna member, which is wound in an outer side of the bell jar 141; ahigh frequency power supply 144 supplying a high frequency power to thecoil 143; and a conductive member 147 as a facing electrode provided ona ceiling wall of the bell jar 141.

The bell jar 141 made of a dielectric material such as a ceramicmaterial, e.g., quartz, A₂O₃, AlN or the like, is of a multi-radiusdomed shape, which has a cylindrical side wall portion 141 a; a domedceiling wall portion 141 b (radius R1=1600 mm˜2200 mm) formed thereon;and a curved corner portion 141 c (radius R2=20 mm˜40 mm) connecting theside wall portion 141 a with the ceiling wall portion 141 b. At an outerside of the side wall portion 141 a forming a cylinder of the bell jar141, the coil 143 is wound with a predetermined number of windings inthe substantially horizontal direction at 5˜10 mm pitch between coils,and preferably, 8 mm pitch; and it is supported to be fixed by using aninsulating material, e.g., a fluorine resin or the like. In the drawing,the number of windings of the coil 143 is four times. The high frequencypower supply 144 is connected to the coil 143 through a matching unit145. The high frequency power supply 144 has a frequency in the range of300 kHz˜60 MHz, and preferably, 450 kHz˜13.56 MHz. Further, a highfrequency power is supplied from the high frequency power supply 144 tothe coil 143 to generate an inductive electromagnetic field in theprocessing space S inside the bell jar 141 through the side wall portion141 a thereof, which is made of a dielectric material.

The gas introducing mechanism 50′ has a ring-shaped gas introducingmember 130 provided between the chamber 10′ and the bell jar 141. Thegas introducing member 130 made of a conductive material such as Al orthe like is grounded. A number of gas discharge holes 131 are formed inthe gas introducing member 130 along the inner peripheral surfacethereof. Further, inside the gas introducing member 130, there isprovided an annular gas flow path 132, into which an Ar gas, an H₂ gasand the like are supplied from the gas supply mechanism 60′, asexplained below; and thus, these gases are discharged through the gasflow path 132 to the processing space S through the gas discharge holes131. The gas discharge holes 131 are formed horizontally to supply theprocessing gas into the bell jar 141. Further, the gas discharge holes131 may be formed to be tilted upward, to thereby supply the processinggas towards the central portion of the bell jar 141.

The gas supply mechanism 60′ for introducing a gas for plasma processinginto the processing space S has a gas supply source, an opening/closingvalve and a mass flow controller for controlling a flow rate (all ofthem not, shown), e.g., like the gas supply mechanism 60 shown in FIG.2; and it supplies a predetermined gas to the gas introducing member 130through a gas line 161. Further, valves and mass flow controllers of therespective lines are controlled by using a controller (not shown).

As a gas for plasma processing, there are illustrated Ar, Ne and He thatmay be individually employed. Further, any of Ar, Ne and He may be usedtogether with H₂, and any of them may be used together with NF₃. Amongthese, as described in FIG. 2, it is preferable that Ar is usedindividually, or together with H₂. The gas for plasma processing isproperly selected based on a target to be etched.

The conductive member 147 serves as a facing electrode, and at the sametime, functions to pressurize the bell jar 141; and it is made ofaluminum, whose surfaces are anodized, aluminum, stainless steel, titanand the like.

In the following, the bell jar 141 will now be explained in detail.

In the present embodiment, a flatness of the bell jar 141 is regulatedto increase the in-surface uniformity in the etching by improving theuniformity in the plasma.

Namely, the flatness K (=D/H), which is defined as a ratio D/H betweenan inner diameter D of the side wall portion 141 a of the bell jar 141and a height H of the central portion of the domed ceiling wall portion141 b, is configured to be in the range of 1.60˜9.25.

If the flatness K is smaller than 1.60, the in-surface uniformity cannotbe improved. Further, if the flatness K is greater than 9.25, winding ofthe coil 143 required for producing a plasma becomes difficult inpractice.

Further, the flatness K1 (=D/H1), which is defined as a ratio D/H1between the inner diameter D of the cylindrical side wall portion 141 aof the bell jar 141 and a height H1 from the top surface of thesusceptor 21 in a central portion of the domed ceiling wall portion 141b, is configured to be in the range of 0.90˜3.85.

Under such a flatness condition, the number of windings of the coil 143may be consequently ten times or less, preferably 7˜2 times, and morepreferably, 4˜2 times.

With respect to the bell jar 141, values of the height H of the centralportion of the domed ceiling wall portion 141 b, the height H1 from thetop surface of the susceptor 21 in the central portion of the domedceiling wall portion 141 b and the inner diameter D of the cylindricalside wall portion 141 a are, e.g., H=98 mm, H1=209 mm and D=450 mm,respectively. At this time, the flatnesses K and K1 are 4.59 and 2.15,respectively.

Further, an example of dimensional relationships between other parts isas described below. Given that an inside measurement of height withrespect to the domed portion of the bell jar 141 is H2; a height in thecylindrical portion of the bell jar 141 is H3 (i.e., H=H2+H3); athickness of the gas introducing member 130 is H4; a height from the topsurface of the susceptor 21 to a top surface of the opening in thechamber 10′ (a mounting surface of the gas introducing member 130) isH5; and a height from the top surface of the susceptor 21 to a topsurface of the gas introducing member 130 is H6, respective dimensionalvalues and ratios thereof are as described below.

Namely, a ratio K2 is H/H6, i.e., about 0.55˜1.50. A ratio K3 is H2/H3,i.e., 2.1 or less, preferably 0.85 or less, and more preferably, 0.67 orless.

Further, a ratio K4 is H2/(H3+H6), i.e., below 0.75, preferably 0.65 orless, and more preferably, about 0.55 or less.

Still further, in case where H2 is about 29˜74 mm, H6+H3 is about 97˜220mm. In case where H3 is about 35 mm or greater, H5+H4 is about 62˜120mm. In case where H2 is about 29 mm, if H3 is about 35˜100 mm, H5 isabout 0˜72 mm, and preferably, about 22˜72 mm.

In case of employing such a bell jar 141 formed by the ratios asmentioned above, a high plasma density area in an outer peripheralportion inside the bell jar 141 is shifted towards the wafer W, so thatan area having uniformized plasma density can be expanded. Accordingly,a plasma is uniformly generated in a part where the wafer W is present,so that an etching uniformity gets improved. For the same reason, it iseffective for a wafer (substrate) of a large diameter, particularly.

In the following, a processing operation by the plasma processingapparatus 100′ as configured above will be discussed.

First, the gate valve 37 is opened to load the wafer W into the chamber10′ by using a transfer arm (not shown), and the wafer elevating pins 31protruded from the susceptor 21 receive thereon the wafer W.Subsequently, the wafer elevating pins 31 are lowered to allow the waferW to be mounted on the susceptor 21, and the shadow rings 23 arelowered.

Thereafter, the gate valve 37 is closed to exhaust insides of thechamber 10′ and the bell jar 141 by using the gas exhaust unit 39 to bekept at a predetermined depressurized state. In such a depressurizedstate, a predetermined gas, e.g., an Ar gas, supplied from the gassupply mechanism 60′ is discharged to the bell jar 141 from the gasdischarge holes 131 of the gas introducing member 130. At the same time,high frequency powers of, e.g., 0˜1000 W and 500˜3000 W are suppliedinto the electrode 24 inside the susceptor 21 and the coil 143 from thehigh frequency power supply 25 for bias and the high frequency powersupply 144 for producing a plasma, respectively. Accordingly, anelectric field is generated between the coil 143 and the conductivemember 147, and the gas introduced into the bell jar 141 is excited toignite the plasma. After the ignition of the plasma, an induced currentflows through the bell jar 141 to generate the plasma continuously, anda native oxide film formed on the wafer W, e.g., a silicon oxide formedon the silicon or a metal oxide film formed on the metal film, is etchedto be removed by the plasma. At this time, a bias is applied to thesusceptor 21 by the high frequency power supply 25, and the wafer W iskept at a predetermined temperature by the heater 28. The temperature is20˜800° C., and preferably, 20˜200° C.

At this time, a plasma density is 0.7˜10×10¹⁰ atoms/cm³, and preferably,1˜6×10¹⁰ atoms/cm³. By performing a processing for about 30 seconds byusing such a plasma, a silicon oxide film (SiO₂) is removed by, e.g.,about 10 nm.

As described above, by removing the impurity layer containing oxidessuch as a native oxide film and the like, adhesivity of a film to beformed may be improved, and an electrical resistance value may bereduced.

Herein, in case of the present embodiment, the flatness K of the belljar 141 is set to 1.60˜9.25, or the flatness K1 is set to 0.90˜3.85, asdescribed above, so that the plasma formed in the bell jar 141 spreadsuniformly over the whole surface of the wafer W. Further, since the highplasma density area in the outer peripheral portion inside the bell jar141 is shifted towards the wafer W, an etching processing is performeduniformly on the whole surface of the wafer W, and thus, the in-surfaceuniformity in the etching is improved. In this case, by regulating R1and R2 as 1600 mm˜2200 mm and 20 mm˜40 mm, respectively, andparticularly, making R1 large, a cross sectional shape of the bell jar141 becomes of a near rectangular flat shape and the plasma is formed inthe bell jar 141 to spread more uniformly over the whole surface of thewafer W. Therefore, the etching processing is performed uniformly on thewhole surface of the wafer W by using the plasma, so that the in-surfaceuniformity in the etching is improved.

FIG. 10A shows a simulation result of an Ar⁺ density distribution of Arplasma in the bell jar, in case of the conventional bell jar having ahigh height (the height H is 137 mm, the inner diameter D is 450 mm andthe number of windings of the coil is ten times); and FIG. 10B shows asimulation result of an Ar⁺ density distribution in the plasma withrespect to the bell jar 141 (the height H is 98 mm, the inner diameter Dis 450 mm and the number of windings of the coil is four times) of thepresent embodiment.

These simulation results support the fact that the Ar⁺ densitydistribution spreads uniformly in the plane direction of the wafer W andthe in-surface uniformity in the etching of the wafer W by the plasma isimproved in case of the present embodiment having more flat shape shownin FIG. 10B, as compared to the conventional art of FIG. 10A.

Namely, for improving the etching uniformity, it is required touniformly generate the plasma (Ar⁺ ion density) in the top surface areaof the wafer. Therefore, it is preferable that the wafer W is completelyimmersed in the area where the Ar⁺ ion density is uniformly formed, inorder to form the area having the uniformized plasma.

Consequently, if the bell jar 141 is configured to be expandedlaterally, the plasma gets spread wider. But, the apparatus becomeslarge, the plasma density is reduced, and more power is required. Thus,an increase in the cost of the apparatus is incurred.

In case of the present embodiment, since the flatnesses K and K1 of thebell jar 141, the ratios K2˜K4, and the height H1 from the top surfaceof the mounting table to the ceiling portion of the bell jar 141 areoptimized, the plasma density may be kept even at low cost and theuniformity may be improved without scaling up the apparatus or increasein power consumption.

FIG. 11 shows an example of a relationship between the height H1 fromthe top surface of the mounting table to the ceiling portion of the belljar 141 and the etching uniformity. As illustrated in FIG. 11, theetching uniformity is substantially constant until H1 becomes 210 mm,but it significantly decreases if H1 becomes higher than 250 mm.Accordingly, in case of the present embodiment, H1 is set to 209 mm asan example, as mentioned above, so that good etching uniformity isobtained.

Further, in the present embodiment, the number of windings of the coil143 is reduced and the height of the bell jar 141 is lowered to make thebell jar 141 flatter, but the chamber 10′ employs the configuration ofthe conventional art. The reason is that by employing same commondesigns for the susceptor, the gate valve and the like in the chamber asthe ones used for other processing apparatus, e.g., such as a filmforming apparatus, it is possible to cut the production cost of thechamber. Further, by employing a same common external transfer mechanismfor loading/unloading the wafers into/from the chamber and a same commonconnection structure to load-lock chambers in multiple species ofprocessing apparatus, e.g., film forming apparatus and etchingapparatus, that is, by standardizing them, it becomes easy to form amulti-chamber apparatus by connecting multiple processing apparatusestogether.

In other words, in accordance with the plasma processing apparatus ofthe present embodiment, since the chamber of the conventional art isemployed as it is, it is possible to realize the improvement of thein-surface uniformity in the plasma processing on the wafer whilesuppressing running cost increase as well as maintaining theuniversality.

In the plasma processing apparatus of the present embodiment, it ispreferable that the identical gas introducing mechanism to that in thefirst embodiment is employed. A configuration thereof is shown in FIG.12. The plasma processing apparatus shown in the drawing employs the gasintroducing mechanism 50 of the first embodiment, instead of using thegas introducing mechanism 50′ shown in FIG. 9. Other configurations arethe same as in the FIG. 9.

Further, in the present embodiment, it is preferable to prepare the sameattaching and detaching mechanism as the attaching and detachingmechanism 70 of the first embodiment.

Third Embodiment

In the following, a third embodiment of the present invention will beexplained. The third embodiment is characterized by a mountingconfiguration of the semiconductor wafer W as a substrate to beprocessed.

FIG. 13 is a schematic cross sectional view showing a mountingconfiguration of the semiconductor wafer in the plasma processingapparatus in accordance with the third embodiment of the presentinvention. In the present embodiment, a cap shaped mask plate 170 isprovided on a susceptor 21 attachably and detachably to form a wafersupporting portion 20″; and the wafer W is configured to be mounted on asurface of the mask plate 170. Since the mounting configuration of thesemiconductor wafer or configurations around the chamber are the same asin the second embodiment, identical reference numerals in FIG. 13 willbe used for the corresponding parts having substantially same functionsand configurations of FIG. 10 in the second embodiment, and explanationsthereof will be simplified.

The mask plate 170 is made of a dielectric material such as quartz(SiO₂) or the like. The mask plate 170 is provided to perform aninitialization of the chamber 10′ by performing a plasma processingwhile the wafer W is not mounted, and to prevent contaminants from beingscattered from the susceptor 21 to the wafer W. Specifically, it iseffective in case when performing an etching to remove the oxide on thesilicon.

As described in the magnified cross sectional view of FIG. 14, a topsurface of the mask plate 170 is configured to be flat such that a wafermounting region 170 a making a contact with a rear surface of the waferW and an outer peripheral region 170 b have the same thickness (height)without having a step portion.

As an example, in case where a diameter of the wafer W is 300 mm, anouter diameter of the mask plate 170 is, e.g., 352 mm.

In the susceptor 21 and the mask plate 170, there are formed, atpositions corresponding to the wafer mounting region 170 a, throughholes 31 b and 170 c into which three wafer elevating pins 31 (only twoof them are shown) for supporting and elevating the wafer W areinserted. The wafer elevating pins 31 are configured to be popped outfrom or popped into the top surface of the mask plate 170 via thethrough holes 31 b and 170 c.

As illustrated in FIG. 15, in the peripheral region 170 b of the topsurface of the mask plate 170, there are almost equi-spacedly arrangedplural positioning projections 171 (six in the present embodiment) tosurround the outer periphery of the wafer W along the circumferentialdirection, to thereby prevent a position of the wafer W mounted on thewafer mounting region 170 a from being shifted off from each other. Asillustrated in FIG. 14, a diameter of a region, where the positioningprojections 171 are arranged, is set such that a gap G between the outerperiphery of the wafer W disposed at an inner side thereof and therespective positioning projections 171 is 0.5˜2 mm, and preferably, 1mm.

As for dimensions of each positioning projection 171, the height may belower than the thickness of the wafer W, i.e., 0.775 mm or less,preferably 0.7 mm or less, and more preferably 0.05˜0.3 mm or less; andthe diameter is 0.2˜5 mm. As an example of the dimensions of eachpositioning projection 171, the diameter is 2.4 mm and the height is 0.3mm. In the surface of the mask plate 170 having a diameter of 352 mm, anarea occupied by these positioning projections 171 is negligibly small.Namely, the peripheral region 170 b on the surface of the mask plate 170is flat and has a substantially same height as the wafer mounting region170 a.

In the wafer mounting region 170 a on the top surface of the mask plate170, there are radially provided ventilation grooves 172 from thecentral portion. One ends of the ventilation grooves 172 communicatewith the through holes 170 c and 31 b into which the wafer elevatingpins 31 are inserted. Further, when the wafer W is mounted on the wafermounting region 170 a in the mask plate 170, an atmosphere between therear surface of the wafer W and the mask plate 170 is rapidly dischargedtowards a rear surface of the susceptor 21 via the ventilation grooves172 and the through holes 170 c and 31 b. In this way, the wafer W canbe prevented from being shifted in an unstable movable state. Further, astable and rapid mounting operation may be performed.

Contrary to this, when the wafer W is levitated from the mask plate 170by an operation for elevating the wafer elevating pins 31, an atmosphereof the rear surface of the susceptor 21 is introduced into the rearsurface of the wafer W via the through holes 31 b and 170 c and theventilation grooves 172. Accordingly, it can be prevented that the rearsurface of the wafer W comes to have a negative pressure to generate anadsorption force, which opposes the levitation of the wafer W, and thusthe rapid levitating operation of the wafer W may be realized.

Here, with respect to the mask plate 170 illustrated in FIGS. 13˜15, thewafer mounting region 170 a making a contact with the rear surface ofthe wafer W to be mounted and the outer peripheral region 170 b areconfigured to be flat with the same thickness (height) without having astep portion. Therefore, an impedance distribution inside the topsurface of the mask plate 170 (susceptor 21) becomes uniform over thewafer mounting region 170 a and the outer peripheral region 170 b whenproducing a plasma. For the same reason, the density distribution of theplasma becomes uniform over the top surface of the wafer mounting region170 a and the outer peripheral region 170 b; a nonuniformity in theprocessing, such as a difference between etching rate at central portionof the wafer W and that at peripheral portion thereof, caused by adifference in the impedance distribution, can be solved; and thein-surface uniformity in the plasma processing such as an etchingprocess can be improved over the whole surface of the wafer W.

FIG. 16 is a graph showing a value of a height dimension Ts (horizontalaxis: unit mm) in a corresponding step portion, and a nonuniformity NU(vertical axis: unit %, it is represented as a percentage of the numberof measurement results, which fall outside the range of 1 σ, against thetotal measurement results; and it is getting more uniform as it gettingsmaller) in an etching result, in case where a step portion forpositioning the wafer W is formed in the wafer mounting region 170 a ofthe mask plate 170.

As is clear from FIG. 16, if the value of Ts becomes small, thenonuniformity NU % in the etching: gets small. Further, it can be notedthat if Ts is zero (it corresponds to a case where the wafer mountingregion 170 a and the peripheral region 170 b′ are flat without makingthe step portion), the nonuniformity becomes minimized, and thus thein-surface uniformity becomes optimal.

Same as in the present embodiment, in case where the wafer mountingconfiguration having the mask plate 170 is applied to the plasmaprocessing apparatus 100′ having the flat bell jar 141 in accordancewith the second embodiment shown in FIG. 10, it is expected that thein-surface uniformity is further improved due to a synergy effect thatthe density distribution of the plasma is uniform by using the flat belljar 141.

Further, even in case where the wafer mounting configuration having themask plate 170 of the present embodiment is applied to the conventionalplasma processing apparatus having a bell jar wherein the number ofwindings of the coil 143 is seven times or more and the height thereofis relatively high, an effect of improving the in-surface uniformity maybe obtained.

Still further, the aforementioned embodiments are merely intended toclarify the technology of the present invention. The present inventionis not limited to the aforementioned embodiments, and various changesand modifications may be made without departing from the spirit andscope of the invention.

For example, while the aforementioned embodiments describe the casewhere the present invention is applied to the apparatus performing aremoval of the native oxide film, the present invention may be appliedto a plasma etching apparatus performing a contact etching and the like,and further, it can be applied to an additional plasma etchingapparatus. Further, the semiconductor wafer was explained as an exampleof an object to be processed, but it is not limited thereto. The presentinvention may be employed in other objects to be processed, e.g., an LCDsubstrate and the like.

Further, it may be within the present invention that the constituents ofthe aforementioned embodiments may be properly combined, or a certainportion thereof may be removed without departing from the spirit andscope of the invention.

1. A processing gas introducing mechanism, provided between a plasmageneration unit and a chamber accommodating therein a substrate to beprocessed of a plasma processing apparatus, for introducing a processinggas into a processing space formed by the plasma generation unit and thechamber, comprising: a gas introducing base disposed on the chamber tosupport the plasma generation unit, the gas introducing base havingtherein a gas introducing path for introducing the processing gas intothe processing space, and, in a central portion thereof, a hole partforming one portion of the processing space; and a near ring-shaped gasintroducing plate equipped in the hole part of the gas introducing basesuch that it can be detached therefrom, the gas introducing plate havingplural gas discharge holes communicating with the processing space todischarge thereinto the processing gas from the gas introducing path. 2.The processing gas introducing mechanism of claim 1, wherein the pluralgas discharge holes are formed in a line along an inner periphery of thegas introducing plate.
 3. The processing gas introducing mechanism ofclaim 1, wherein the gas introducing path formed in the gas introducingbase has a first gas flow path into which a processing gas isintroduced; an annular or a semicircular second gas flow pathcommunicating with the first gas flow path; a number of third gas flowpaths extending towards the processing space from the second gas flowpath; and a fourth gas flow path communicating with the third gas flowpaths and the gas discharge holes formed in the gas introducing plate.4. The processing gas introducing mechanism of claim 3, wherein thefourth gas flow path is formed between the gas introducing base and thegas introducing plate.
 5. The processing gas introducing mechanism ofclaim 1, wherein a step portion is formed in an inner peripheral portionof the gas introducing base; another step portion is formed in an outerperipheral portion of the gas introducing plate; and the gas introducingplate is attached to the gas introducing base by matching said two stepportions together.
 6. The processing gas introducing mechanism of claim1, wherein the processing gas introducing mechanism is installed suchthat it can be detached from the chamber together with the plasmageneration unit.
 7. A plasma processing apparatus, comprising: a plasmageneration unit for producing a plasma; a chamber accommodating thereina substrate to be processed; and a processing gas introducing mechanism,provided between the plasma generation unit and the chamber, forintroducing a processing gas for producing a plasma into a processingspace formed by the plasma generation unit and the chamber, wherein theprocessing gas introducing mechanism includes: a gas introducing basedisposed on the chamber to support the plasma generation unit, the gasintroducing base having therein a gas introducing path for introducingthe processing gas into the processing space, and, in a central portionthereof, a hole part forming one portion of the processing space; and anear ring-shaped gas introducing plate equipped in the hole part of thegas introducing base such that it can be detached therefrom, the gasintroducing plate having plural gas discharge holes communicating withthe processing space to discharge thereinto the processing gas from thegas introducing path.
 8. The plasma processing apparatus of claim 7,wherein the plural gas discharge holes are formed equi-spacedly along aninner periphery of the gas introducing plate.
 9. The plasma processingapparatus of claim 7, wherein the gas introducing path formed in the gasintroducing base of the processing gas introducing mechanism has a firstgas flow path into which a processing gas is introduced; an annular or asemicircular second gas flow path communicating with the first gas flowpath; a number of third gas flow paths extending towards the processingspace from the second gas flow path; and a fourth gas flow pathcommunicating with the third gas flow paths and the gas discharge holesformed in the gas introducing plate.
 10. The plasma processing apparatusof claim 9, wherein the fourth gas flow path is formed between the gasintroducing base and the gas introducing plate.
 11. The plasmaprocessing apparatus of claim 7, wherein a step portion is formed in aninner peripheral portion of the gas introducing base; another stepportion is formed in an outer peripheral portion of the gas introducingplate; and the gas introducing plate is attached to the gas introducingbase by matching said two step portions together.
 12. The plasmaprocessing apparatus of claim 7, further comprising an attaching anddetaching mechanism for attaching the processing gas introducingmechanism and the plasma generation unit to the chamber and detachingthem therefrom.
 13. The plasma processing apparatus of claim 7, whereinthe plasma generation unit has: a dielectric wall; an antenna providedat an outer side of the dielectric wall; and a high frequency powersupply for supplying a high frequency power to the antenna, wherein ahigh frequency power is supplied to the antenna to generate aninductively coupled plasma in the processing space through thedielectric wall.
 14. The plasma processing apparatus of claim 13,wherein the dielectric wall is a bell jar, and the antenna is a coilwound in an outer periphery of the bell jar.
 15. A plasma processingapparatus, comprising: a plasma generation unit for producing a plasma;a chamber accommodating therein a substrate to be processed; aprocessing gas introducing mechanism, provided between the plasmageneration unit and the chamber and disposed in the chamber to supportthe plasma generation unit, for introducing a processing gas forproducing a plasma into a processing space formed by the plasmageneration unit and the chamber; and an attaching and detachingmechanism for attaching the processing gas introducing mechanism and theplasma generation unit to the chamber and detaching them therefrom. 16.The plasma processing apparatus of claim 15, wherein the attaching anddetaching mechanism includes a hinge mechanism for rotating as a unitthe processing gas introducing mechanism and the plasma generation unit.17. The plasma processing apparatus of claim 16, wherein the attachingand detaching mechanism includes a damper mechanism for applying alifting force to the processing gas introducing mechanism and the plasmageneration unit in a rotation direction thereof when the processing gasintroducing mechanism and the plasma generation unit are rotated as aunit to be detached.
 18. The plasma processing apparatus of claim 15,wherein the attaching and detaching mechanism includes a handle unit forperforming attaching and detaching operations on the processing gasintroducing mechanism and the plasma generation unit.
 19. The plasmaprocessing apparatus of claim 15, wherein the plasma generation unithas: a dielectric wall; an antenna provided at an outer side of thedielectric wall; and a high frequency power supply for supplying a highfrequency power to the antenna, wherein a high frequency power issupplied to the antenna to generate an inductively coupled plasma in theprocessing space through the dielectric wall.
 20. The plasma processingapparatus of claim 19, wherein the dielectric wall is a bell jar, andthe antenna is a coil wound in an outer periphery of the bell jar. 21.The plasma processing apparatus of claim 15, wherein the processing gasintroducing mechanism includes: a gas introducing base disposed on thechamber to support the plasma generation unit, the gas introducing basehaving therein a gas introducing path for introducing the processing gasinto the processing space, and, in a central portion thereof, a holepart forming one portion of the processing space; and a near ring-shapedgas introducing plate equipped in the hole part of the gas introducingbase such that it can be detached therefrom, the gas introducing platehaving plural gas discharge holes communicating with the processingspace to discharge thereinto the processing gas from the gas introducingpath.
 22. A plasma processing apparatus for performing a plasmaprocessing on a substrate to be processed, the apparatus comprising: achamber accommodating therein the substrate to be processed; a plasmageneration unit, having a bell jar and an antenna, for producing aplasma inside the bell jar, wherein the bell jar made of a dielectricmaterial is provided at an upper part of the chamber to communicatetherewith and the antenna is coiled around an outer side of the bell jarto generate an induced electric field in the bell jar; a processing gasintroducing mechanism, provided between the plasma generation unit andthe chamber, for introducing a processing gas for producing a plasmainto a processing space formed by the plasma generation unit and thechamber; and a mounting table for mounting thereon the substrate to beprocessed provided in the chamber, wherein, given that an inner diameterof the bell jar is D and an inside measurement of height in a centralportion of the bell jar is H, a flatness K defined by a ratio D/H is inthe range of 1.60˜9.25.
 23. The plasma processing apparatus of claim 22,wherein the bell jar has a cylindrical sidewall portion and a ceilingwall portion provided thereon, and the antenna is wound in thecylindrical sidewall portion.
 24. The plasma processing apparatus ofclaim 22, wherein the number of windings of the antenna is four times orless.
 25. The plasma processing apparatus of claim 22, furthercomprising a mask, made of a dielectric material, for covering themounting table, wherein the mask has a first region where the substrateto be processed is mounted and a second region around the first region,and the first and the second region are configured to have a sameheight.
 26. The plasma processing apparatus of claim 25, wherein, in thesecond region, there are provided plural projections for positioning thesubstrate to be processed at a position of the first region.
 27. Theplasma processing apparatus of claim 25, wherein, in the first region,there are installed a number of pin holes through which elevating pinsfor elevating the substrate to be processed from the mounting tablepenetrate; and groove patterns communicating with the pin holes.
 28. Theplasma processing apparatus of claim 22, wherein the processing-gasintroducing mechanism includes: a gas introducing base disposed on thechamber to support the bell jar, the gas introducing base having thereina gas introducing path for introducing the processing gas into theprocessing space, and, in a central portion thereof, a hole part formingone portion of the processing space; and a near ring-shaped gasintroducing plate equipped in the hole part of the gas introducing basesuch that it can be detached therefrom, the gas introducing plate havingplural gas discharge holes communicated with the processing space todischarge thereinto the processing gas from the gas introducing path.29. The plasma processing apparatus of claim 22, further comprising anattaching and detaching mechanism for attaching the processing gasintroducing mechanism and the plasma generation unit to the chamber anddetaching them therefrom.
 30. The plasma processing apparatus of claim22, wherein the bell jar is of a multi-radius domed shape formed of aceiling wall portion whose radius R1 is in the range of 1600 mm˜2200 mm;a cylindrical sidewall portion; and a corner portion, having a radius R2of 20 mm˜40 mm, for connecting the ceiling wall portion with thesidewall portion.
 31. A plasma processing apparatus for performing aplasma processing on a substrate to be processed, the apparatuscomprising: a chamber accommodating therein′ the substrate to beprocessed; a plasma generation unit, having a bell jar and an antenna,for producing a plasma inside the bell jar, wherein the bell jar made ofa dielectric material is provided at an upper part of the chamber tocommunicate therewith and the antenna is coiled around an outer side ofthe bell jar to generate an induced electric field in the bell jar; aprocessing gas introducing mechanism, provided between the plasmageneration unit and the chamber, for introducing a processing gas forproducing a plasma into a processing space formed by the plasmageneration unit and the chamber; and a mounting table for mountingthereon the substrate to be processed provided in the chamber, wherein,given that an inner diameter of the bell jar is D and a distance from aceiling portion of a central portion of the bell jar to the mountingtable is H1, a flatness K1 defined by a ratio D/H1 is in the range of0.90˜3.85.
 32. The plasma processing apparatus of claim 31, wherein thebell jar has a cylindrical sidewall portion and a ceiling wall portionprovided thereon, and the antenna is wound in-the cylindrical sidewallportion.
 33. The plasma processing apparatus of claim 31, wherein thenumber of windings of the antenna is four times or less.
 34. The plasmaprocessing apparatus of claim 31, further comprising a mask, made of adielectric material, for covering the mounting table, wherein the maskhas a first region where the substrate to be processed is mounted and asecond region around the first region, and the first and the secondregion are configured to have a same height.
 35. The plasma processingapparatus of claim 34, wherein, in the second region, there are providedplural projections for positioning the substrate to be processed at aposition of the first region.
 36. The plasma processing apparatus ofclaim 34, wherein, in the first region, there are installed a number ofpin holes through which elevating pins for elevating the substrate to beprocessed from the mounting table penetrate; and groove patternscommunicating with the pin holes.
 37. The plasma processing apparatus ofclaim 31, wherein the bell jar is of a multi-radius domed shape formedof a ceiling wall portion whose radius R1 is in the range of 1600mm˜2200 mm; a cylindrical sidewall portion; and a corner portion, havinga radius R2 of 20 mm˜40 mm, for connecting the ceiling wall portion withthe sidewall portion.
 38. A plasma processing apparatus for performing aplasma processing on a substrate to be processed, the apparatuscomprising: a chamber accommodating therein the substrate to beprocessed; a plasma generation unit, having a bell jar and an antenna,for producing a plasma inside the bell jar, wherein the bell jar made ofa dielectric material is provided at an upper part of the chamber tocommunicate therewith and the antenna is coiled around an outer side ofthe bell jar to generate an induced electric field in the bell jar; aprocessing gas introducing mechanism, provided between the plasmageneration unit and the chamber, for introducing a processing gas forproducing a plasma into a processing space formed by the plasmageneration unit and the chamber; a mounting table for mounting thereonthe substrate to be processed provided in the chamber; and a mask, madeof a dielectric material, for covering the mounting table and mountingthereon the substrate to be processed, and wherein the mask has a firstregion where the substrate to be processed is mounted and a secondregion around the first region, and the first and the second region areconfigured to have a same height.
 39. The plasma processing apparatus ofclaim 38, wherein, in the second region, there are provided pluralprojections for positioning the substrate to be processed at a positionof the first region.
 40. The plasma processing apparatus of claim 38,wherein, in the first region, there are installed a number of pin holesthrough which elevating pins for elevating the substrate to be processedfrom the mounting table penetrate; and groove patterns communicatingwith the pin holes.
 41. The plasma processing apparatus of claim 38,wherein, given that an inner diameter of the bell jar is D and an insidemeasurement of height in a central portion of the bell jar is H, aflatness K defined by a ratio D/H is in the range of 1.60˜9.25.
 42. Theplasma processing apparatus of claim 38, wherein, given that an innerdiameter of the bell jar is D and a distance from a ceiling portion of acentral portion of the bell jar to the mounting table is H1, a flatnessK1 defined by a ratio D/H1 is in the range of 0.90˜3.85.
 43. The plasmaprocessing apparatus of claim 38, wherein the bell jar is of amulti-radius domed shape formed of a ceiling wall portion whose radiusR1 is in the range of 1600 mm˜2200 mm; a cylindrical sidewall portion;and a corner portion, having a radius R2 of 20 mm˜40 mm, for connectingthe ceiling wall portion with the sidewall portion.